Design of Detection System of Quartz Wafer's Defect
نویسندگان
چکیده
منابع مشابه
Axiomatic System Design for Non-thermal Dicing of Quartz Wafers
In the manufacture of light emitting diodes (LEDs), the process of dicing that separates fabricated chips into pieces from quartz wafers is critically important as it determines the quality and productivity of produced LEDs. However, traditional methods using either mechanical grinding wheels or relatively long pulse lasers suffers mechanical or thermal defects such as debris, cracks, heat-affe...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.01.557